X - Ray Photoelectron Spectroscopy Study of the Dfierence between Reactively Evaporated

X-ray photoelectron spectroscopy (XPS) technique has been used to study carefully prepared oxide-free titanium nitride (TiN) films of nearly identicd stoichiometry, grown by direct sputtering and reactive evaporation. The lineshapes and pe~ positions of the Ti 2p and N 1s transitions are dependent upon the deposition method. The XPS results showed that oxynitrides me present following exposure of either type of fti to dry oxygen; however, reactively evaporated films have a considerably higher oxidation rate. Differences in valence band and electron energy loss spectroscopy @ELS) spectra are correlated with the changes observed in the core levels. The EELS spectra detected the presence of a low energy loss, which is correlated with the TiN electron density of states closest to the Fermi level. The second~ electron emission yields for reactively evaporated TiN were also measured before and after dry oxygen and air exposure, and after heating. -.